Model 1210 30 kV Electron Probe Power Supply

• Output ripple <150 mV at full load
• Temperature coeff. <15 ppm/C
• Stored energy is low (< 1 J)
• Low reflected ripple on input power line
• Separate connection for HV output cable shield and programming reference
• Very compact case size

Model 1210 is a high-stability power supply designed for the difficult requirements of electron microprobes and focused ion beam systems. It features low ripple and low stored energy. The low stored energy at the output reduces computer system upsets when arcing occurs within the beam column and prevents damage to the semiconductor wafer being probed. Outputs are available to 30 kV. The standard output voltage is 20 kV.

The low output ripple is the result of using sine wave excitation to the high voltage multiplier plus the use of a novel ripple cancellation circuit. Hence, low output ripple is achieved without using a large value output capacitor. Sine wave excitation generates less noise on the input power line compared to square wave excitation.

The 1210 uses separate power return lines for the high voltage load, the input power and the voltage programming reference. Separating these signals reduces unwanted interactions between the critical programming reference and the other circuits.