Model 1316 Electron and Ion Beam Precision High Voltage Power Supply

Very low output ripple <200 mV peak-to-peak at full load, 30 kV at 1 mA (20 kV at 2 mA)
Temperature coefficient <15 ppm/° C
Separate connection for HV output cable shield and programming reference
Over voltage and over current limited
Short-circuit and arc protected
Automatic output voltage recovery after arcs and short circuits
AC input
Local/remote programming and metering
Positive or negative polarity
Safety compliance to SEMI S2-93

The model 1316 is ideal for system component or laboratory use in applications requiring a highly stable, highly regulated, low-noise source of high voltage power. Available in a wide range of precision and ultra-precision configurations for system and laboratory use. Safety compliance to SEMI S2-93. All designs incorporate short-circuit and arc protection.

Applications
Typical applications include focused ion beam machines, electron microscopes and electron beam lithography.

Output voltage	0.010 to 20 kV
Output current	300 uA maximum
Line regulation	0.002%
Load regulation	0.002%
Output ripple	<150 mV peak-to-peak maximum
Time stability	0.005% in 1 hour, 0.01% in 8 hours
Temperature coefficient	<25 ppm/C
Input power	120 VAC @ 0.65 maximum
Operating temperature range	0 to 50C
Output connector	CPS HVC 130 compatible
Program voltage	5 volts in for 20 kV output
Voltage monitor	40 u or 5 V for 20 kV output
Current monitor	5 volts for 300 uA output;