Model 1966A | E-beam Lithography Supply

Five high voltage outputs
Accelerating focus voltage
Floating filament supply
Extremely low ripple and outstanding stability
Low line and load regulation of high voltage outputs
All outputs short circuit and arc protected
Computer controlled via parallel digital differential interface
Each high voltage output is current and voltage limited
Very good cross regulation
Very low cross talk ripple
Very low temperature coefficient
Standard 19-inch rack mounted chassis: 19" by 22.5" by 10.5"

The model 1966A has five high voltage outputs. It features an accelerating focus voltage and a floating filament supply. It has extremely low ripple and outstanding stability.

Model 1966A manual

Voltage
Input voltage	120 VAC 10%
Input current	1.2 A maximum
Input power	95 W maximum
High voltage connector	7 pin 10589-02 Connectronics
Beam Supply
Output voltage	up to -15 kV
Output current	10 micro amps
Set ability	10 ppm/hr and 10 ppm/C,(5 ppm optional)
Stability	<15 Vp-p
Ripple/Noise	less than 100 mV pp
Extraction Supply (referenced to the beam voltage)
Output voltage	up to +15 kV
Output current	1 mA
Set ability	16-bit (0.23 V LSB)
Stability	10 ppm/hr and 10 ppm/C (5 ppm optional)
Ripple/Noise	less than 100 mV pp
Accelerating Focus Supply (referenced to the ground)
Output voltage	up to +30 kV
Output current	10 micro amps
Set ability	16 bit (0.46 V LSB)
Stability	10 ppm/hr and 10 ppm/C (5 ppm optional)
Ripple/Noise	less than 150 mV pp
Suppressor Supply (referenced to the beam voltage)
Output voltage	up to -2 kV
Output current	10 micro amps
Set ability	16 bit (0.46 V LSB)
Stability	10 ppm/hr and 10 ppm/C (5 ppm optional)
Ripple/Noise	less than 100 mV pp
Filament Current Supply (referenced to the beam voltage)
Output voltage	up to 5.5 V
Output current	current 0 to 3.5 A
Set ability	16 bit (30 micro amps LSB)
Stability	100 ppm/hr
Ripple/Noise	less than 1 mA at 2.5 A

Model 1966A Dimensions