Model 2593 Electron Beam, Ion Beam, X-Ray Tube Power Supply

• Very low output ripple <200 mV peak-to-peak at fu
• Temperature coefficient <50 ppm/° C
• Stored energy is low (<0.1 J at 15 kV)
• Low reflected ripple on input power line
• Very compact case size
• Over voltage and overcorrect limited
• Short-circuit and arc protected
• Automatic output voltage recovery after arcs and short circuits

Model 2593 is a high-stability power supply designed for the difficult requirements of focused ion and electron beam systems. It features low ripple and low stored engery. The low stored energy at the output reduces computer system upsets when arcing occurs within the beam column and prevents damage to the semiconductor wafer being probed. The low output ripple is the result of using sine wave excitation to the high voltage multiplier plus the use of a novel ripple cancellation circuit. Hence, low output ripple is achieved without using a large value output capacitor. Sine wave excitation generates less noise on the input power line compared to square wave excitation. The 2593 uses separate power return lines for the high voltage load, the input power and the voltage programming reference. Separating these signals reduced unwanted interactions between the critical programming reference and the other circuits.