Model 3601 -30 kV Power Supply

• Output ripple <100 mV at full load
• Temperature coefficient <300 ppm/°C
• Stored energy is low (< 1 J)
• Low reflected ripple on input power line
• Rack mountable

Model 3601 is a high voltage system for scanning electron microscopes. It provides -30 kV accelerator voltage, 10kV bias/focus voltage and up to 5 amps for the gun's filament. The bias and filament supplies are floating at the accelerator voltage. An isolated serial communication link to an external computer allows controlling the three supplies and monitoring their outputs. The supplied software includes a Windows graphical user interface and its DLL. The source is available from CPS.

 

3601 Instruction Manual

3601 Application Software

 

3601 Block Diagram

Click to Enlarge

Acceleration Voltage

High voltage output	0 ~ -30Kv (negative DC voltage)
Current	300 uA at -30Kv full load (Maximum)
Accuracy	less than +-1% from 0 ~ 30Kv
Ripple	less than 10ppm p-p at -30Kv
Stability	10ppm/hour (temp 25°C, bias and filament fixed)
Temperature coefficient	less than 100 ppm/°C
Variable steps	Liner or 100V steps

Bias Voltage

High voltage output	0 ~ +10Kv (positive DC voltage)
Current	200 uA at +10Kv (Maximum)
Accuracy	less than +-5% from 0 ~ +10Kv
Ripple	100mV p-p
Stability	10ppm/10 minutes (temp 25°C filament fixed)
Temperature coefficient	less than 1000 ppm/°C
Variable steps	Liner or 255 steps more

Filament Current

Output	Power 0 to 38W (0.1A to 5A at up to +5Vdc)
Load Resistance	0.2O ~ 1O +- 10% (filament + cable resistance) For using different cathode type.
Accuracy	+-3% of FS or 0.1W, which ever is greater
Ripple	less than 100mV p-p
Stability	100ppm/10 minutes
Temperature coefficient	less than 300 ppm/°C
Variable steps	Liner or 255 steps more

Note: the filaments can be isolated from ground by up to 40kV, while power input and all controls remain at groudn potential.