
Within this compact 25 x 12 x 20 cm enclosure are three common power supplies used by scanning electron microscopes. The filament and Wehnelt voltages are floating on the accelerator voltage. All three are remotely programmable via an RS-232 or USB data port. Connection to a SEM are through a conventional 3-pin Federal connector. A plug-in terminal block connects 24VDC input power, an external safety interlock, and an HV On status bit.
Two status lights show serial communication activity and a heartbeat lamp indicates the 3603's processor is active.
The Wehnelt voltage is derived from the bias supply.
A C-language demo program allows controlling all supplies and reports communication activity. It displays the set-point of each supply and the actual measured outputs. An internal temperature sensor is also displayed.
3603 Block Diagram
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3603 Control Panel
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| Output voltage range | -500 to -30,000VDC |
| Output current | -300 uA | Output ripple & noise | <300 mV |
| Output temperature drift | 10 ppm/hour |
| Programmable step size | 1 ppm |
Wehnelt
| Output voltage range | 0 to -2000 VDC |
| Output current | 200 uA |
| Programmable step size | 1 ppm |
| Stability | 50 ppm/hour |
| Ripple &noise | <100 mV |
Filament
| Output voltage | 0 to 5 VDC |
| Output current | 0 to 3 A |
| Output ripple | < 100 mV |
| Output temperature drift | 100 ppm/hour |
| Programmable step resolution | 1 ppm |
Communication
| Connector | DB-9 male |
| Signal levels | RS-232 or USB with special cable | Bit rate | 57 kbits/sec |
| Isolation | 1000 VDC max |
General
| Input power | 24VDC ± 1.5V, 3A |
| Operating temperature range | 10C to 35C | Interlock circuit | Closed contact enables H.V. |
| Dimensions | 254 mm x 190 mm x 114mm 10”L x 7.5”D x 4.5”H |
| Weight | 5 kg (11 lb) |
| Output connector | 3-pin CA1-type Claymount |
| Input terminal block | Requires 6-pin Phoenix Contact 1803617 |
| Temperature monitor | Inside floating H.V. section |
| Model 3602 | Qty 1. $3,750 | Qty2-9. $3,405 |
| Claymount H.V. cable | Qty 1. $300 | |
| USB to RS-232 data cable | Qty 1. $30 |