Model 2591 |30kV Ion Bean Power Supply

• Output ripple <200 mVp-p at 500 uA
• Temperature coeff. <25 ppm/C
• Stored energy is low (< 1 J)
• Low reflected ripple on input power line
• Separate connection for HV output, cable shield, and programming reference
• Very compact case size

Model 2591 is a high-stability power supply designed for the difficult requirements of focused ion beam systems. It features low ripple and low stored energy. The low stored energy at the output reduces computer system upsets when arcing occurs within the beam column and prevents damage to the semiconductor wafer being probed.

The low output ripple is the result of using sine wave excitation to the high voltage multiplier plus the use of a novel ripple cancellation circuit. Hence, low output ripple is achieved without using a large value output capacitor. Sine wave excitation generates less noise on the input power line compared to square wave excitation.

The 2591 uses separate power return lines for the high voltage load, the input power and the voltage programming reference. Separating these signals reduces unwanted interactions between the critical programming reference and the other circuits